The Office for Science and Technology Advisors, forerunner to the DOIT, was founded in 1979 in accordance with the Technology Development Program for the purpose of enhancing industrial technology. It was established in accordance with "Regulations for Establishing the Office of Science and Technology Advisors of the MOEA".

In 1993, it was transformed into the Department of Industrial Technology in accordance with Article 21 of the MOEA's Organizational Laws.